PDT

BATCH Platform

引领单机产能逼近1GW

业界首创六篮大产能槽式清洗设备

单机产能可达16000 wph 以上，较上一代提升50%

单片化学品/DI耗量节省>15%，加热能耗节省>20%

兼容各种硅片尺寸，最大至230mm

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